Effects of gate oxide deposition methods on excimer laser crystallized poly-Si thin film transistors

BD van Dijk, GJ Bertens, R Ishihara

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	EuroDisplay '99: proceedings
Place of Publication	Berlin
Publisher	VDE
Pages	335-338
Number of pages	4
ISBN (Print)	3-8007-2478-2
Publication status	Published - 1999
Event	19th International Display Research Conference, Berlin - Berlin Duration: 6 Sept 1999 → 9 Sept 1999

Name
Publisher	VDE

Conference	19th International Display Research Conference, Berlin
Period	6/09/99 → 9/09/99

Keywords

@inproceedings{4d5952f1cd434d629bfc9c2f91d7f145,

title = "Effects of gate oxide deposition methods on excimer laser crystallized poly-Si thin film transistors",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Dijk}, BD and GJ Bertens and R Ishihara",

year = "1999",

language = "Undefined/Unknown",

isbn = "3-8007-2478-2",

publisher = "VDE",

pages = "335--338",

booktitle = "EuroDisplay '99: proceedings",

note = "19th International Display Research Conference, Berlin ; Conference date: 06-09-1999 Through 09-09-1999",

}

TY - GEN

T1 - Effects of gate oxide deposition methods on excimer laser crystallized poly-Si thin film transistors

AU - van Dijk, BD

AU - Bertens, GJ

AU - Ishihara, R

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 3-8007-2478-2

SP - 335

EP - 338

BT - EuroDisplay '99: proceedings

PB - VDE

CY - Berlin

T2 - 19th International Display Research Conference, Berlin

Y2 - 6 September 1999 through 9 September 1999

ER -