Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

TMH Pham; T Akkaya; CR de Boer; CCG Visser; PM Sarro

Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

TMH Pham, T Akkaya, CR de Boer, CCG Visser, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	662-666
Number of pages	5
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	SAFE, Veldhoven, NL; - Utrecht Duration: 27 Nov 2002 → 28 Nov 2002

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	SAFE, Veldhoven, NL;
Period	27/11/02 → 28/11/02

Bibliographical note

CD-ROM

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{b5b826cfd05649b1960dbe3ac2187f3a,

title = "Electrical and optical properties of PECVD SiC thin films for surface micromachined devices",

keywords = "Conf.proc. > 3 pag",

author = "TMH Pham and T Akkaya and {de Boer}, CR and CCG Visser and PM Sarro",

note = "CD-ROM; SAFE, Veldhoven, NL; ; Conference date: 27-11-2002 Through 28-11-2002",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-73461-33-2",

publisher = "STW Technology Foundation",

pages = "662--666",

booktitle = "SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop",

}

Electrical and optical properties of PECVD SiC thin films for surface micromachined devices. / Pham, TMH; Akkaya, T; de Boer, CR et al.
SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop. Utrecht: STW Technology Foundation, 2002. p. 662-666.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

AU - Pham, TMH

AU - Akkaya, T

AU - de Boer, CR

AU - Visser, CCG

AU - Sarro, PM

N1 - CD-ROM

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-33-2

SP - 662

EP - 666

BT - SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop

PB - STW Technology Foundation

CY - Utrecht

T2 - SAFE, Veldhoven, NL;

Y2 - 27 November 2002 through 28 November 2002

ER -