Original language | English |
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Title of host publication | Advanced Metallization and Interconnect Systems for ULSI Applications in 1995 |
Editors | RC Ellwanger, Shi-Qing Wang |
Place of Publication | Pittsburgh, USA |
Publisher | Material Research Society |
Pages | 575-579 |
Number of pages | 5 |
Publication status | Published - 1996 |
Publication series
Name | |
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Publisher | Material Research Society |