Original language | English |
---|---|
Pages (from-to) | 122-126 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 121 |
Publication status | Published - 2014 |
Keywords
- CWTS 0.75 <= JFIS < 2.00
S Hari, AM Goossens, LMK Vandersypen, CW Hagen
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 122-126 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 121 |
Publication status | Published - 2014 |