Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

M. Venkatesh; B. El Mansouri; J. Wei; A. Bossche; G.Q. Zhang

doi:10.1109/eurosime.2016.7463385

Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

M. Venkatesh, B. El Mansouri, J. Wei, A. Bossche, G.Q. Zhang

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Abstract

In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.

Original language	English
Title of host publication	2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Publisher	IEEE
Pages	1-9
Number of pages	9
ISBN (Electronic)	978-1-5090-2106-2
DOIs	https://doi.org/10.1109/eurosime.2016.7463385
Publication status	Published - 5 May 2016
Event	EuroSimE 2016: 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Montpellier, France Duration: 17 Apr 2016 → 20 Apr 2016 Conference number: 17 https://www.eurosime.org/index.php/2016-montpellier/

Conference

Conference	EuroSimE 2016
Country/Territory	France
City	Montpellier
Period	17/04/16 → 20/04/16
Internet address	https://www.eurosime.org/index.php/2016-montpellier/

Keywords

Electrodes
Capacitance
Heating
Analytical models
Sensors
Micromechanical devices
Capacitors

Access to Document

10.1109/eurosime.2016.7463385

Cite this

Venkatesh, M., Mansouri, B. E., Wei, J., Bossche, A., & Zhang, G. Q. (2016). Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (pp. 1-9). IEEE. https://doi.org/10.1109/eurosime.2016.7463385

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title = "Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications",

abstract = "In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.",

keywords = "Electrodes, Capacitance, Heating, Analytical models, Sensors, Micromechanical devices, Capacitors",

author = "M. Venkatesh and Mansouri, {B. El} and J. Wei and A. Bossche and G.Q. Zhang",

year = "2016",

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doi = "10.1109/eurosime.2016.7463385",

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note = "EuroSimE 2016 : 17th International Conference on Thermal Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems ; Conference date: 17-04-2016 Through 20-04-2016",

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Venkatesh, M, Mansouri, BE , Wei, J , Bossche, A & Zhang, GQ 2016, Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications. in 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, pp. 1-9, EuroSimE 2016, Montpellier, France, 17/04/16. https://doi.org/10.1109/eurosime.2016.7463385

Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications. / Venkatesh, M.; Mansouri, B. El ; Wei, J. et al.
2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, 2016. p. 1-9.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

AU - Venkatesh, M.

AU - Mansouri, B. El

AU - Wei, J.

AU - Bossche, A.

AU - Zhang, G.Q.

N1 - Conference code: 17

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N2 - In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.

AB - In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.

KW - Electrodes

KW - Capacitance

KW - Heating

KW - Analytical models

KW - Sensors

KW - Micromechanical devices

KW - Capacitors

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M3 - Conference contribution

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EP - 9

BT - 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

PB - IEEE

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Venkatesh M, Mansouri BE , Wei J , Bossche A , Zhang GQ. Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications. In 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE. 2016. p. 1-9 doi: 10.1109/eurosime.2016.7463385

Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

Abstract

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Keywords

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