Experimental investigation of adhesion and friction phenomena of ultrananocrystalline diamond (UNCD) and aluminum oxide in MEMS

F Buja

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Staufer, U., Supervisor van Spengen, Merlijn, Advisor
Award date	15 Sept 2015
Print ISBNs	978-94-6186-527-4
DOIs	https://doi.org/10.4233/uuid:c700e976-e79e-4e7c-9210-95e90796d108
Publication status	Published - 2015

Access to Document

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