• HJ Voorma
  • E Louis
  • NB Koster
  • LA Smaenok
  • F Bijkerk
  • T Zijlstra
  • LEM de Groot
  • EWJM van der Drift
  • BAC Rousseeuw
  • J Romijn
  • J Friedrich
Original languageUndefined/Unknown
Pages (from-to)293-298
Number of pages6
JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume15
Publication statusPublished - 1997

ID: 3761612