Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

HW van Zeijl, SL Paalvast, J Su, J van Eijk, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationthe 14th International Conference on Solid-State Sensors, Actuators and Microsystems
Editors IEEE
Place of PublicationLyon
PublisherTransducers & Eurosensors '07
Pages1605-1608
Number of pages4
ISBN (Print)1-4244-0842-3
Publication statusPublished - 2007
Eventthe 14th International Conference on Solid-State Sensors, Actuators and Microsystems - Lyon
Duration: 10 Jun 200714 Jun 2007

Publication series

Name
PublisherTransducers & Eurosensors '07

Conference

Conferencethe 14th International Conference on Solid-State Sensors, Actuators and Microsystems
Period10/06/0714/06/07

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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