@article{972a13aa365b42dc9ca393487f5b21d1,
title = "Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics",
author = "E Serre and M Bonaldi and A Borrielli and F Marin and L Marconi and F Marino and G Pandraud and A Pontin and GA Prodi and PM Sarro",
note = "Harvest Special issue: Micro/Nano Devices and Systems 2014 Available online 6-4-2015",
year = "2015",
doi = "10.1016/j.mee.2015.03.036",
language = "English",
volume = "145",
pages = "138--142",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",
number = "September",
}