Three low pressure micro-resistojets (LPM) with integrated heater and temperature measurement were designed, manufactured and characterized at Delft university of technology. The devices were manufactured using silicon-based micro electro mechanical systems (MEMS) technology including a heater made of molybdenum for better operations at high temperature. The resistace of the heaters is used to estimate the chip temperature giving them a double function as heater and sensor simultaneously. The manufacturing steps are described in detail. A special interface was manufactured to hold the MEMS device considering the mechanical and electrical aspects. The MEMS devices are characterized for three different aspects: mechanical, electrical and propulsion. The three designed devices were tested mechanically and electrically, and one design was tested in terms of propulsion performance in a near-operational condition. The tests are promising and open the path to design a flight demonstration model.

Original languageEnglish
Article number125005
Number of pages11
JournalJournal of Micromechanics and Microengineering
Issue number12
Publication statusPublished - 30 Oct 2017

    Research areas

  • free molecule micro-resistojet, low pressure micro-resistojet, micro-thruster, microfluidic, rarefied gas

ID: 36210547