Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

H Ohji, PTJ Gennissen, PJ French, K Tsutsumi

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

11 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	MEMS '99 [CD-ROM]
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	1-5
Number of pages	5
ISBN (Print)	0-7803-5197-5
Publication status	Published - 1999
Event	12th IEEE International Micro Electro Mechanical Systems Conference, Orlando - Piscataway Duration: 17 Jan 1999 → 21 Jan 1999

Name
Publisher	IEEE

Conference	12th IEEE International Micro Electro Mechanical Systems Conference, Orlando
Period	17/01/99 → 21/01/99

Keywords

@inproceedings{cd177f71668940458b4b49c5bfd2a203,

title = "Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "H Ohji and PTJ Gennissen and PJ French and K Tsutsumi",

year = "1999",

language = "Undefined/Unknown",

isbn = "0-7803-5197-5",

publisher = "IEEE Society",

pages = "1--5",

booktitle = "MEMS '99 [CD-ROM]",

note = "12th IEEE International Micro Electro Mechanical Systems Conference, Orlando ; Conference date: 17-01-1999 Through 21-01-1999",

}

TY - GEN

T1 - Fabrication of accelerometer using single-step electrochemical etching for micro structures (SEEMS)

AU - Ohji, H

AU - Gennissen, PTJ

AU - French, PJ

AU - Tsutsumi, K

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-5197-5

SP - 1

EP - 5

BT - MEMS '99 [CD-ROM]

PB - IEEE Society

CY - Piscataway

T2 - 12th IEEE International Micro Electro Mechanical Systems Conference, Orlando

Y2 - 17 January 1999 through 21 January 1999

ER -