@inproceedings{20a925d13aed45caaada7710899e0839,
title = "Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "AT Tran and G Pandraud and H Schellevis and T Alan and V Aravindh and O Wunnicke and PM Sarro",
year = "2011",
doi = "10.1016/j.proeng.2011.12.166",
language = "English",
publisher = "Elsevier",
pages = "673--676",
editor = "C Tsamis and G Kaltas",
booktitle = "Proceedings Eurosensors XXV, September 4-7, 2011, Athens, Greece",
note = "Eurosensors XXV ; Conference date: 04-09-2011 Through 07-09-2011",
}