Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph

S Grabarnik, A Emadi, HW Wu, G de Graaf, GV Vdovin, RF Wolffenbuttel

Research output: Contribution to journalArticleScientific

3 Citations (Scopus)
Original languageUndefined/Unknown
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number6
Publication statusPublished - 2008

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • CWTS 0.75 <= JFIS < 2.00

Cite this