Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

M. L. Ridder; P. Khosropanah; R. A. Hijmering; T. Suzuki; M. P. Bruijn; H. F C Hoevers; J. R. Gao; M. R. Zuiddam

doi:10.1007/s10909-015-1381-z

Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

M. L. Ridder^*, P. Khosropanah, R. A. Hijmering, T. Suzuki, M. P. Bruijn, H. F C Hoevers, J. R. Gao, M. R. Zuiddam

^*Corresponding author for this work

QN/Kavli Nanolab Delft

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20 Citations (Scopus)

Abstract

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10^{- 19} W/Hz^{1 / 2} have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

Original language	English
Pages (from-to)	60-65
Number of pages	6
Journal	Journal of Low Temperature Physics
Volume	184
Issue number	1-2
DOIs	https://doi.org/10.1007/s10909-015-1381-z
Publication status	Published - 1 Jul 2016

Keywords

Bolometer
SiN membrane
Transition edge sensors

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10.1007/s10909-015-1381-z

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title = "Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA",

abstract = "Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.",

keywords = "Bolometer, SiN membrane, Transition edge sensors",

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doi = "10.1007/s10909-015-1381-z",

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AU - Ridder, M. L.

AU - Khosropanah, P.

AU - Hijmering, R. A.

AU - Suzuki, T.

AU - Bruijn, M. P.

AU - Hoevers, H. F C

AU - Gao, J. R.

AU - Zuiddam, M. R.

PY - 2016/7/1

Y1 - 2016/7/1

N2 - Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

AB - Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 × 10- 19 W/Hz1 / 2 have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 μ m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

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KW - SiN membrane

KW - Transition edge sensors

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Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

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Keywords

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