@inproceedings{e1a5d4011fab4e4b97fe8db990d0b41e,
title = "Fabrication technology for micromachined spatial light modulators",
keywords = "Conf.proc. > 3 pag",
author = "S Sakarya and GV Vdovin and PM Sarro",
year = "2003",
language = "Undefined/Unknown",
isbn = "0-8194-4739-0",
publisher = "The International Society for Optical Engineering",
pages = "219--226",
editor = "GC Righini",
booktitle = "Proceedings of SPIE; integrated optical devices: fabrication and testing",
note = "Integrated optical devices: fabrication and testing, Brugge, Belgium ; Conference date: 30-10-2002 Through 01-11-2002",
}