Fabricaton of submicron single-crystalline and bamboo Al lines by recrystallization

MJC van de Homberg, AH Verbruggen, PFA Alkemade, AG Dirks, JL Hurd, S Radelaar

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	277-280
Number of pages	4
Journal	Microelectronic Engineering
Volume	35
Publication status	Published - 1997

Cite this

@article{601d68f80a7d49318bbacaa82a5827b8,

title = "Fabricaton of submicron single-crystalline and bamboo Al lines by recrystallization",

author = "{van de Homberg}, MJC and AH Verbruggen and PFA Alkemade and AG Dirks and JL Hurd and S Radelaar",

year = "1997",

language = "Undefined/Unknown",

volume = "35",

pages = "277--280",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}