Original language | Undefined/Unknown |
---|---|
Title of host publication | Global Semiconductor Manufacturing Technology |
Publisher | Business Briefing |
Pages | 149-152 |
ISBN (Print) | 190315037X |
Publication status | Published - 2001 |
Keywords
- ZX Int.klas.verslagjaar < 2002
MJ Geuzebroek, AJ van de Goor Ph D, JT van Linden
Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific
Original language | Undefined/Unknown |
---|---|
Title of host publication | Global Semiconductor Manufacturing Technology |
Publisher | Business Briefing |
Pages | 149-152 |
ISBN (Print) | 190315037X |
Publication status | Published - 2001 |