Failure analysis of a thin-film nitride MEMS package

Q Li, JFL Goosen, JTM van Beek, F van Keulen, KL Phan, GQ Zhang

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1557-1561
Number of pages5
JournalMicroelectronics Reliability
Volume48
Publication statusPublished - 2008

Keywords

  • CWTS JFIS < 0.75

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