Field emission for cantilever sensors

Research output: Contribution to journal › Article › Scientific

Original language	Undefined/Unknown
Pages (from-to)	927-933
Number of pages	7
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	26
Issue number	3
Publication status	Published - 2008

Keywords

@article{316c73da7d994cf2873db6136803571c,

title = "Field emission for cantilever sensors",

keywords = "Elektrotechniek, Techniek, professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "CK Yang and {le F{\`e}bre}, A.J. and G Pandraud and {van der Drift}, EWJM and PJ French",

year = "2008",

language = "Undefined/Unknown",

volume = "26",

pages = "927--933",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Field emission for cantilever sensors

AU - Yang, CK

AU - le Fèbre, A.J.

AU - Pandraud, G

AU - van der Drift, EWJM

AU - French, PJ

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 26

SP - 927

EP - 933

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 3

ER -