| Original language | English |
|---|---|
| Place of Publication | Delft |
| Publisher | Technische Universiteit Delft |
| Number of pages | 3 |
| Publication status | Published - 1996 |
Publication series
| Name | |
|---|---|
| Publisher | Technische Universiteit Delft |
First evaluation of new process steps with 0.25 micrometer design rules
? Lerme, Y Gobil, GCAM Janssen
Research output: Book/Report › Report › Professional