Flexibility studies on ultra-thin silicon substrates

L Wang; M Bartek; A Poliakov; KMB Jansen; LJ Ernst

Flexibility studies on ultra-thin silicon substrates

L Wang, M Bartek, A Poliakov, KMB Jansen, LJ Ernst

Dynamics of Micro and Nano Systems

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)
Editors	W Krautschneider
Place of Publication	Utrecht
Publisher	Technology Stichting STW
Pages	175-180
Number of pages	6
ISBN (Print)	90-73461-50-2
Publication status	Published - 2005
Event	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands - Utrecht Duration: 17 Nov 2005 → 18 Nov 2005

Publication series

Name
Publisher	Technology Stichting STW

Conference

Conference	STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands
Period	17/11/05 → 18/11/05

Bibliographical note

STW

Keywords

conference contrib. refereed
Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{8a0a9025064d4f15a666dc5ed7eb7771,

title = "Flexibility studies on ultra-thin silicon substrates",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "L Wang and M Bartek and A Poliakov and KMB Jansen and LJ Ernst",

note = "STW; STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands ; Conference date: 17-11-2005 Through 18-11-2005",

year = "2005",

language = "Undefined/Unknown",

isbn = "90-73461-50-2",

publisher = "Technology Stichting STW",

pages = "175--180",

editor = "W Krautschneider",

booktitle = "Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)",

}

Wang, L, Bartek, M, Poliakov, A, Jansen, KMB & Ernst, LJ 2005, Flexibility studies on ultra-thin silicon substrates. in W Krautschneider (ed.), Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). Technology Stichting STW, Utrecht, pp. 175-180, STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands, 17/11/05.

Flexibility studies on ultra-thin silicon substrates. / Wang, L; Bartek, M; Poliakov, A et al.
Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005). ed. / W Krautschneider. Utrecht: Technology Stichting STW, 2005. p. 175-180.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Flexibility studies on ultra-thin silicon substrates

AU - Wang, L

AU - Bartek, M

AU - Poliakov, A

AU - Jansen, KMB

AU - Ernst, LJ

N1 - STW

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-50-2

SP - 175

EP - 180

BT - Proceedings of the STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005)

A2 - Krautschneider, W

PB - Technology Stichting STW

CY - Utrecht

T2 - STW annual workshop on semiconductor advances for future electronics and sensors (SAFE 2005), Veldhoven, the Netherlands

Y2 - 17 November 2005 through 18 November 2005

ER -