@article{4c68389df2994844a5fbbe62683da3b7,
title = "Focused Electron Beam Induced Deposition of 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane; preliminary study on the role of low energy secondary electrons in the deposition process",
author = "O Ingolfsson and R Kumar and CW Hagen and S Hari",
note = "harvest XXIX International Conference on Photonic, Electronic, and Atomic Collisions (ICPEAC2015)",
year = "2015",
doi = "10.1088/1742-6596/635/7/072088",
language = "English",
volume = "635",
pages = "1--1",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing",
number = "art.nr. 072088",
}