@inproceedings{6851c623343e4177824385927a8ef9c9,
title = "Front- to backwafer alignment, overlay and wafer distortion in substrate transfer technologies",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "{van Zeijl}, HW and JHCM Slabbekoorn and LK Nanver and {van Dijk}, PWL and T Machielsen",
year = "2000",
language = "Undefined/Unknown",
isbn = "90-73461-24-3",
publisher = "STW Technology Foundation",
pages = "163--167",
editor = "{JP Veen}",
booktitle = "SAFE-ProRISC-SeSens 2000: proceedings",
}