Original language | English |
---|---|
IPC | C30B; H01L; C03B; C01B |
Priority date | 18/12/17 |
Publication status | Published - 2019 |
Bibliographical note
Patent: OCT-17-096Applicant: TU Delft
Sten Vollebregt (Inventor), Filiberto Ricciardella (Inventor), Lina Sarro (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | C30B; H01L; C03B; C01B |
Priority date | 18/12/17 |
Publication status | Published - 2019 |