Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 223-234 |
Number of pages | 12 |
Journal | Journal of Crystal Growth |
Volume | 164 |
Publication status | Published - 1996 |
Gas Source MBE growth of Si/SiGe device materials
K Werner, AJ Storm, S Butzke, JWH Maes, M van Rooy, PFA Alkemade, E Algra, MAJ Somers, BGM de Lange, EWJM van der Drift, T Zijlstra, S Radelaar
Research output: Contribution to journal › Article › Scientific › peer-review
12
Citations
(Scopus)