@inproceedings{0d16fe9d2ff147c181d4c5435e474eb5,
title = "Glass-to-glass anodic bonding",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "M Berthold and L Nicola and PM Sarro and MJ Vellekoop",
year = "1999",
language = "Undefined/Unknown",
isbn = "90-73461-18-9",
publisher = "STW Technology Foundation",
pages = "33--36",
booktitle = "SAFE99:proceedings. ProRISC99: proceedings",
note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",
}