We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

Original languageEnglish
Title of host publicationProceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)
EditorsJ Ducrée, M Despont
Place of PublicationPiscataway, NJ, USA
PublisherIEEE
Pages628-631
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018
EventMEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018
https://www.mems2018.org/

Conference

ConferenceMEMS 2018
CountryUnited Kingdom
CityBelfast
Period21/01/1825/01/18
Internet address

ID: 45193896