Graphene gas pumps

Dejan Davidovikj; Damian Bouwmeester; Herre S.J. Van Der Zant; Peter G. Steeneken

doi:10.1109/MEMSYS.2018.8346632

Graphene gas pumps

Dejan Davidovikj, Damian Bouwmeester, Herre S.J. Van Der Zant, Peter G. Steeneken^*

^*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

23 Downloads (Pure)

Abstract

We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

Original language	English
Title of host publication	Proceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)
Editors	J Ducrée, M Despont
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	628-631
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346632
Publication status	Published - 2018
Event	MEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 https://www.mems2018.org/

Conference

Conference	MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18
Internet address	https://www.mems2018.org/

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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title = "Graphene gas pumps",

abstract = "We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.",

author = "Dejan Davidovikj and Damian Bouwmeester and {Van Der Zant}, {Herre S.J.} and Steeneken, {Peter G.}",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; MEMS 2018 : 31st IEEE International Conference on Micro Electro Mechanical Systems ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

doi = "10.1109/MEMSYS.2018.8346632",

language = "English",

pages = "628--631",

editor = "J Ducr{\'e}e and M Despont",

booktitle = "Proceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)",

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AU - Davidovikj, Dejan

AU - Bouwmeester, Damian

AU - Van Der Zant, Herre S.J.

AU - Steeneken, Peter G.

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2018

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N2 - We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

AB - We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

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BT - Proceedings 2018 IEEE Micro Electro Mechanical Systems (MEMS 2018)

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Y2 - 21 January 2018 through 25 January 2018

ER -

Graphene gas pumps

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