Grayscale lithography characterization for 3D structuring

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proc. 19th micromechanics europe (MME 2008)
Editors	U SChnakenberg
Place of Publication	Aachem, Germany
Publisher	Instituut of Materials in Electrical Engineering
Pages	133-136
Number of pages	4
ISBN (Print)	978-3-00-025529-8
Publication status	Published - 2008
Event	Proc. 19th micromechanics europe (MME 2008) Aachen, Germany - Aachem, Germany Duration: 28 Sept 2008 → 30 Sept 2008

Name
Publisher	Instituut of Materials in Electrical Engineering

Conference	Proc. 19th micromechanics europe (MME 2008) Aachen, Germany
Period	28/09/08 → 30/09/08

Keywords

@inproceedings{fc1911ccb0644a248990769486221a68,

title = "Grayscale lithography characterization for 3D structuring",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "D Lui and {van Zeijl}, HW and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-3-00-025529-8",

publisher = "Instituut of Materials in Electrical Engineering",

pages = "133--136",

editor = "U SChnakenberg",

booktitle = "Proc. 19th micromechanics europe (MME 2008)",

note = "Proc. 19th micromechanics europe (MME 2008) Aachen, Germany ; Conference date: 28-09-2008 Through 30-09-2008",

}

Grayscale lithography characterization for 3D structuring. / Lui, D; van Zeijl, HW ; Sarro, PM.
Proc. 19th micromechanics europe (MME 2008). ed. / U SChnakenberg. Aachem, Germany: Instituut of Materials in Electrical Engineering, 2008. p. 133-136.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Grayscale lithography characterization for 3D structuring

AU - Lui, D

AU - van Zeijl, HW

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-3-00-025529-8

SP - 133

EP - 136

BT - Proc. 19th micromechanics europe (MME 2008)

A2 - SChnakenberg, U

PB - Instituut of Materials in Electrical Engineering

CY - Aachem, Germany

T2 - Proc. 19th micromechanics europe (MME 2008) Aachen, Germany

Y2 - 28 September 2008 through 30 September 2008

ER -