Growth mechanisms during homoepitaxial growth of silicon

J van Wingerden

    Research output: Thesis › Dissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Tuinstra, F., Supervisor
    • Scholte, PMLO, Advisor, External person
    Award date6 Apr 1999
    Publication statusPublished - 1999

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