@inproceedings{2d2ec0050f8940a4ad68e372e0aa5866,
title = "high performance silicon based extreme ultraviolet radiation detector for industrial application",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "L Shi and F Sarubbi and S Nihtianov and LK Nanver and TLM Scholtes and F Scholze",
year = "2009",
language = "Undefined/Unknown",
publisher = "IEEE Society",
pages = "1891--1896",
editor = "s.n.",
booktitle = "high performance silicon based extreme ultraviolet radiation detector for industrial application",
note = "IEEE industrial electronics society 2009 ; Conference date: 03-11-2009 Through 05-11-2009",
}