Original language | Undefined/Unknown |
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Title of host publication | Advanced Metalization and Interconnect Systems for ULSI Applications 1996 |
Editors | JSR Havemann, H Komiyama, K Tsubouchi |
Pages | 51-56 |
Number of pages | 6 |
Publication status | Published - 1997 |
High Pressure Aluminium Via-Fill for ULSI interconnect using a Liquid Transducer
JF Jongste, X Li, JP Lokker, GCAM Janssen, S Radelaar, ThW de Loos
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific