Original language | Undefined/Unknown |
---|---|
Title of host publication | Materials Research Society |
Editors | JKR Cheung, K Tsubouchi, M Murakami, N Kobayashi |
Pages | 217-224 |
Number of pages | 8 |
Publication status | Published - 1998 |
High Pressure Filling of Sub-micron Aluminium Vias
JF Jongste, JP Lokker, GCAM Janssen, AH Verbruggen, S Radelaar
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific