Abstract
This thesis describes the theory, design, and implementation of high-speed capacitive displacement sensor interface circuits. The intended application is to readout the capacitive displacement sensor used in a servo loop, where the measurement time needs to be low to ensure loop stability....
Original language | English |
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Awarding Institution |
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Award date | 11 Nov 2019 |
Print ISBNs | 978-94-028-1785-0 |
DOIs | |
Publication status | Published - 2019 |