An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al2O3) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al2O3 coated HA-CNTs (Al2O3/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.

Original languageEnglish
Title of host publicationMEMS 2017
Subtitle of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
Publication statusPublished - 2017
EventMEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30


ConferenceMEMS 2017
Abbreviated titleIEEE MEMS 2017
CountryUnited States
CityLas Vegas, NV

    Research areas

  • Coatings, Carbon nanotubes, Aluminium oxide, Conductivity, Optical sensors, Morphology, Fabrication

ID: 29530970