Abstract
An unprecedented enhancement in electrical conductivity of horizontally aligned carbon nanotube (HA-CNT) structures using a 10 nm conformal coating of alumina (Al2O3) or amorphous silicon carbide (a-SiC) is presented. By combining the capability to grow long vertically aligned CNTs (VA-CNTs) with a liquid-assisted flattening technique, dense arrays of HA-CNTs exhibiting a high degree of alignment are realized and integrated at wafer-scale. Suspended structures, ranging from large area membranes to narrow beams, can be fabricated. The impressive enhancement in electrical conductivity, approximately 209% for the Al2O3 coated HA-CNTs (Al2O3/HA-CNTs) and 2276% for the a-SiC ones (a-SiC/HA-CNTs), demonstrates the potential of CNT-based scaffolds as scalable and functional building blocks for suspended interconnects, heat spreaders and novel chemical and optical sensors.
Original language | English |
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Title of host publication | MEMS 2017 |
Subtitle of host publication | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 266-269 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-5090-5078-9 |
Publication status | Published - 2017 |
Event | MEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30 |
Conference
Conference | MEMS 2017 |
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Abbreviated title | IEEE MEMS 2017 |
Country/Territory | United States |
City | Las Vegas, NV |
Period | 22/01/17 → 26/01/17 |
Keywords
- Coatings
- Carbon nanotubes
- Aluminium oxide
- Conductivity
- Optical sensors
- Morphology
- Fabrication