Humidity sensor based on the ionic polymer metal composite

Emad  Esmaeli; Mahya  Ganjian; Hamed Rastegar; Mohammadreza Kolahdouz; Zahra Koladouz; Guo Qi Zhang

doi:10.1016/j.snb.2017.03.018

Humidity sensor based on the ionic polymer metal composite

Emad Esmaeli, Mahya Ganjian, Hamed Rastegar, Mohammadreza Kolahdouz, Zahra Koladouz , Guo Qi Zhang

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

41 Citations (Scopus)

Abstract

In this paper, a novel method for fabrication of an ionic polymer-metal composite (IPMC)-based humidity sensor is developed and optimized. IPMC is a kind of smart material that can work as a sensor or an actuator in wet environments or liquids. Poor adhesion between electrodes and the polymer and peeling off phenomenon are common problems in IPMC fabrication. Mechanical roughening, plasma treatment of the polymer surface and sputtering a thin layer of Ti and Cr as adhesion layers between polymer and Au electrodes are proposed to solve these issues. Different fabricated IPMC electrodes were then used as a capacitor to measure the relative humidity variations at different deflections and relative humidity conditions and the results have been compared. Our results show that IPMC using Au with 990 nm thicknesses worked properly and a sensitivity value of 13.43% was achieved.

Original language	English
Pages (from-to)	498-504
Number of pages	8
Journal	Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers
Volume	247
DOIs	https://doi.org/10.1016/j.snb.2017.03.018
Publication status	Published - 2017

Keywords

IPMC sensing
Sputtering deposition method
Au electrode
Humidity sensor

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10.1016/j.snb.2017.03.018

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title = "Humidity sensor based on the ionic polymer metal composite",

abstract = "In this paper, a novel method for fabrication of an ionic polymer-metal composite (IPMC)-based humidity sensor is developed and optimized. IPMC is a kind of smart material that can work as a sensor or an actuator in wet environments or liquids. Poor adhesion between electrodes and the polymer and peeling off phenomenon are common problems in IPMC fabrication. Mechanical roughening, plasma treatment of the polymer surface and sputtering a thin layer of Ti and Cr as adhesion layers between polymer and Au electrodes are proposed to solve these issues. Different fabricated IPMC electrodes were then used as a capacitor to measure the relative humidity variations at different deflections and relative humidity conditions and the results have been compared. Our results show that IPMC using Au with 990 nm thicknesses worked properly and a sensitivity value of 13.43% was achieved.",

keywords = "IPMC sensing, Sputtering deposition method, Au electrode, Humidity sensor",

author = "Emad Esmaeli and Mahya Ganjian and Hamed Rastegar and Mohammadreza Kolahdouz and Zahra Koladouz and Zhang, {Guo Qi}",

year = "2017",

doi = "10.1016/j.snb.2017.03.018",

language = "English",

volume = "247",

pages = "498--504",

journal = "Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers",

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TY - JOUR

T1 - Humidity sensor based on the ionic polymer metal composite

AU - Esmaeli, Emad

AU - Ganjian, Mahya

AU - Rastegar, Hamed

AU - Kolahdouz, Mohammadreza

AU - Koladouz , Zahra

AU - Zhang, Guo Qi

PY - 2017

Y1 - 2017

N2 - In this paper, a novel method for fabrication of an ionic polymer-metal composite (IPMC)-based humidity sensor is developed and optimized. IPMC is a kind of smart material that can work as a sensor or an actuator in wet environments or liquids. Poor adhesion between electrodes and the polymer and peeling off phenomenon are common problems in IPMC fabrication. Mechanical roughening, plasma treatment of the polymer surface and sputtering a thin layer of Ti and Cr as adhesion layers between polymer and Au electrodes are proposed to solve these issues. Different fabricated IPMC electrodes were then used as a capacitor to measure the relative humidity variations at different deflections and relative humidity conditions and the results have been compared. Our results show that IPMC using Au with 990 nm thicknesses worked properly and a sensitivity value of 13.43% was achieved.

AB - In this paper, a novel method for fabrication of an ionic polymer-metal composite (IPMC)-based humidity sensor is developed and optimized. IPMC is a kind of smart material that can work as a sensor or an actuator in wet environments or liquids. Poor adhesion between electrodes and the polymer and peeling off phenomenon are common problems in IPMC fabrication. Mechanical roughening, plasma treatment of the polymer surface and sputtering a thin layer of Ti and Cr as adhesion layers between polymer and Au electrodes are proposed to solve these issues. Different fabricated IPMC electrodes were then used as a capacitor to measure the relative humidity variations at different deflections and relative humidity conditions and the results have been compared. Our results show that IPMC using Au with 990 nm thicknesses worked properly and a sensitivity value of 13.43% was achieved.

KW - IPMC sensing

KW - Sputtering deposition method

KW - Au electrode

KW - Humidity sensor

U2 - 10.1016/j.snb.2017.03.018

DO - 10.1016/j.snb.2017.03.018

M3 - Article

SN - 0925-4005

VL - 247

SP - 498

EP - 504

JO - Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators B: Chemical: international journal devoted to research and development of physical and chemical transducers

ER -

Humidity sensor based on the ionic polymer metal composite

Abstract

Keywords

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