IC-compatible two-level bulk micromachining for RF components

PN Pham, TK Ng, JMW Laros, TLM Scholtes, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE99: proceedings. ProRISC99: proceedings [CD-ROM]
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages359-362
Number of pages4
ISBN (Print)90-73461-18-9
Publication statusPublished - 1999
Event2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo - Utrecht
Duration: 24 Nov 199925 Nov 1999

Publication series

Name
PublisherSTW technology foundation

Conference

Conference2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo
Period24/11/9925/11/99

Keywords

  • ZX Int.klas.verslagjaar < 2002

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