Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

K Babaei Gavan; HJR Westra; EWJM van der Drift; WJ Venstra; HSJ van der Zant

Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

K Babaei Gavan, HJR Westra, EWJM van der Drift, WJ Venstra, HSJ van der Zant

QN/Kavli Nanolab Delft

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

11 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	Microelectronic engineering
Editors	M Rossum, van
Place of Publication	Europa
Publisher	Elsevier
Pages	1216-1218
Number of pages	3
ISBN (Print)	0167-9317
Publication status	Published - 2009
Event	34th Conference on Micro and nano Engineering - Europa Duration: 15 Sept 2008 → 18 Sept 2008

Publication series

Name
Publisher	Elsevier

Name	Microelectronic Engineering
Volume	86
ISSN (Print)	0167-9317

Conference

Conference	34th Conference on Micro and nano Engineering
Period	15/09/08 → 18/09/08

Keywords

conference contrib. refereed
Geen BTA classificatie

Cite this

@inproceedings{29d9e2f472e442afb7ba366eb7ef385d,

title = "Impact of fabrication technology on flexural resonances of silicon nitride cantilevers",

keywords = "conference contrib. refereed, Geen BTA classificatie",

author = "{Babaei Gavan}, K and HJR Westra and {van der Drift}, EWJM and WJ Venstra and {van der Zant}, HSJ",

year = "2009",

language = "Undefined/Unknown",

isbn = "0167-9317",

publisher = "Elsevier",

pages = "1216--1218",

editor = "{Rossum, van}, M",

booktitle = "Microelectronic engineering",

note = "34th Conference on Micro and nano Engineering ; Conference date: 15-09-2008 Through 18-09-2008",

}

Impact of fabrication technology on flexural resonances of silicon nitride cantilevers. / Babaei Gavan, K; Westra, HJR; van der Drift, EWJM et al.
Microelectronic engineering. ed. / M Rossum, van. Europa: Elsevier, 2009. p. 1216-1218 (Microelectronic Engineering; Vol. 86).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

AU - Babaei Gavan, K

AU - Westra, HJR

AU - van der Drift, EWJM

AU - Venstra, WJ

AU - van der Zant, HSJ

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Geen BTA classificatie

M3 - Conference contribution

SN - 0167-9317

SP - 1216

EP - 1218

BT - Microelectronic engineering

A2 - Rossum, van, M

PB - Elsevier

CY - Europa

T2 - 34th Conference on Micro and nano Engineering

Y2 - 15 September 2008 through 18 September 2008

ER -