Individual beam control in multi electron beam systems

Christiaan Zonnevylle

Research output: Thesis › Dissertation (TU Delft)

556 Downloads (Pure)

Original language	English
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Kruit, P., Supervisor
Award date	6 Feb 2017
Print ISBNs	978-94-6186-783-4
DOIs	https://doi.org/10.4233/uuid:23221904-c9c1-4537-af7f-abdbb9df06ed
Publication status	Published - 2017

Access to Document

@phdthesis{23221904c9c14537af7fabdbb9df06ed,

title = "Individual beam control in multi electron beam systems",

author = "Christiaan Zonnevylle",

year = "2017",

doi = "10.4233/uuid:23221904-c9c1-4537-af7f-abdbb9df06ed",

language = "English",

isbn = "978-94-6186-783-4",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}