In-plane displacement detection with picometer accuracy on a conventional microscope

J Kokorian; F Buja; WM van Spengen

doi:10.1109/JMEMS.2014.2335153

In-plane displacement detection with picometer accuracy on a conventional microscope

J Kokorian, F Buja, WM van Spengen

Micro and Nano Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

25 Citations (Scopus)

Original language	English
Pages (from-to)	618-625
Journal	IEEE Journal of Microelectromechanical Systems
Volume	24
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2014.2335153
Publication status	Published - 2015

Keywords

CWTS 0.75 <= JFIS < 2.00

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10.1109/JMEMS.2014.2335153

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title = "In-plane displacement detection with picometer accuracy on a conventional microscope",

keywords = "CWTS 0.75 <= JFIS < 2.00",

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AU - Buja, F

AU - van Spengen, WM

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JO - IEEE Journal of Microelectromechanical Systems

JF - IEEE Journal of Microelectromechanical Systems

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In-plane displacement detection with picometer accuracy on a conventional microscope

Keywords

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