Integrated virtual impactor enabled PM2.5 sensor

Mingzhi Dong, Elina Iervolino, Fabio Santagata, Guoyi Zhang, Guoqiang Zhang

Research output: Contribution to journalArticleScientificpeer-review

20 Citations (Scopus)

Abstract

As more and more proofs show that fine particles (diameter of 2.5μm and below) pose more risk on human health than coarse particles, an increasing need for monitoring fine particles has emerged. A miniaturized sensor designed for measuring fine particle concentration is presented in this paper. The proposed sensor possesses a compact size of only 15 mm × 10mm × 1mm. A virtual impactor has been integrated as a particle size selector and the design is optimized by simulation-assisted analysis. The sensor is realized by silicon microfabrication and wafer-level packaging. Testing results show that a high measurement accuracy of 2.55 μg/m3 has been achieved.

Original languageEnglish
Article number7879799
Pages (from-to)2814-2821
Number of pages8
JournalIEEE Sensors Journal
Volume17
Issue number9
DOIs
Publication statusPublished - 2017

Keywords

  • PM
  • silicon microfabrication
  • virtual impactor

Fingerprint

Dive into the research topics of 'Integrated virtual impactor enabled PM2.5 sensor'. Together they form a unique fingerprint.

Cite this