Ion implantation

LK Nanver, EJG Goudena

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Wiley encyclopedia of electrical and electronics engineering. Vol. 10
Editors	JG Webster
Place of Publication	New York
Publisher	Wiley
Pages	707-718
Publication status	Published - 1999

Keywords

@inbook{966844217c0342efb3dc01ffc950d0d2,

title = "Ion implantation",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "LK Nanver and EJG Goudena",

year = "1999",

language = "Undefined/Unknown",

pages = "707--718",

editor = "{JG Webster}",

booktitle = "Wiley encyclopedia of electrical and electronics engineering. Vol. 10",

publisher = "Wiley",

}