Irreversible Kinetics in CVD: A Reinterpretation of titanium Nitride and Tungsten Formation

PJ van der Put, JAM Ammerlaan, JP Dekker, J Schoonman

Research output: Contribution to journal › Article › Scientific › peer-review

ISSN: 0948-1907, Chemical Vapor Deposition 5

Cite this

@article{32fdba48fc944b65afaf2e8758e1749a,

title = "Irreversible Kinetics in CVD: A Reinterpretation of titanium Nitride and Tungsten Formation",

author = "{van der Put}, PJ and JAM Ammerlaan and JP Dekker and J Schoonman",

note = "ISSN: 0948-1907, Chemical Vapor Deposition 5",

year = "1999",

language = "Undefined/Unknown",

volume = "5",

pages = "211--218",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley",

}