Isothermal stress relaxation in Al, AlCu and AlVPd films

JP Lokker, JF Jongste, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationAdvanced Metallization and Interconnect Systems for ULSI Applications in 1995
    EditorsRC Ellwanger, Shi-Qing Wang
    Place of PublicationPittsburgh
    PublisherMaterials Research Society
    Pages513-516
    Number of pages4
    Publication statusPublished - 1996
    EventAdvanced Metallization and Interconnect Systems for ULSI Applications in 1995 - Pittsburgh
    Duration: 3 Oct 19965 Oct 1996

    Publication series

    Name
    PublisherMaterials Research Society

    Conference

    ConferenceAdvanced Metallization and Interconnect Systems for ULSI Applications in 1995
    Period3/10/965/10/96

    Cite this