Original language | Undefined/Unknown |
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Title of host publication | MRS 1997 spring meeting VII |
Editors | RRKJJ Clement, KS Kirsch, JE Sanchez |
Pages | 267-272 |
Number of pages | 6 |
Publication status | Published - 1997 |
Kinetics of Cu segregation in AlCu (1%) submicron interconnects studied by resistance measurements
AJ Kalkman, GCAM Janssen, AH Verbruggen, S Radelaar
Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific