Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

Z Xiao, Guoying Wu, Min Chen, Changde Zhao, Dacheng Zhang, Yilong Hao, ZH Li

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Transducers '99: digest of technical papers. Vol. 1
Place of Publication	Tokyo
Publisher	Institute of Electrical Engineers of Japan
Pages	1518-1521
Number of pages	4
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan - Tokyo Duration: 7 Jun 1999 → 10 Jun 1999

Name
Publisher	Institute of Electrical Engineers of Japan

Conference	10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan
Period	7/06/99 → 10/06/99

Keywords

@inproceedings{1de53353c3ae4aa9ad891ce2e03ea7ce,

title = "Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "Z Xiao and Guoying Wu and Min Chen and Changde Zhao and Dacheng Zhang and Yilong Hao and ZH Li",

year = "1999",

language = "Undefined/Unknown",

publisher = "Institute of Electrical Engineers of Japan",

pages = "1518--1521",

booktitle = "Transducers '99: digest of technical papers. Vol. 1",

note = "10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan ; Conference date: 07-06-1999 Through 10-06-1999",

}

Xiao, Z, Wu, G, Chen, M, Zhao, C, Zhang, D, Hao, Y & Li, ZH 1999, Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching. in Transducers '99: digest of technical papers. Vol. 1. Institute of Electrical Engineers of Japan, Tokyo, pp. 1518-1521, 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, 7/06/99.

Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching. / Xiao, Z; Wu, Guoying; Chen, Min et al.
Transducers '99: digest of technical papers. Vol. 1. Tokyo: Institute of Electrical Engineers of Japan, 1999. p. 1518-1521.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Laterally capacity sensed accelerometer fabricated with anodic bonding and high aspect ratio etching

AU - Xiao, Z

AU - Wu, Guoying

AU - Chen, Min

AU - Zhao, Changde

AU - Zhang, Dacheng

AU - Hao, Yilong

AU - Li, ZH

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 1518

EP - 1521

BT - Transducers '99: digest of technical papers. Vol. 1

PB - Institute of Electrical Engineers of Japan

CY - Tokyo

T2 - 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan

Y2 - 7 June 1999 through 10 June 1999

ER -