Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

Y Civale; LK Nanver; P Hadley; HW van Zeijl; EJG Goudena; H Schellevis

Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

Y Civale, LK Nanver, P Hadley, HW van Zeijl, EJG Goudena, H Schellevis

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings
Editors	V Schmidt
Place of Publication	San Francisco, USA
Publisher	Material Research Society
Pages	-
Publication status	Published - 2006
Event	MRS Spring Meeting - San Francisco, USA Duration: 17 Apr 2006 → 21 Apr 2006

Publication series

Name
Publisher	Material Research Society

Conference

Conference	MRS Spring Meeting
Period	17/04/06 → 21/04/06

Bibliographical note

isbn: 978-1-55899-897-1, page: 0940-p05-04

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

Civale, Y., Nanver, LK., Hadley, P., van Zeijl, HW., Goudena, EJG., & Schellevis, H. (2006). Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications. In V. Schmidt (Ed.), Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings (pp. -). Material Research Society.

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title = "Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "Y Civale and LK Nanver and P Hadley and {van Zeijl}, HW and EJG Goudena and H Schellevis",

note = "isbn: 978-1-55899-897-1, page: 0940-p05-04; MRS Spring Meeting ; Conference date: 17-04-2006 Through 21-04-2006",

year = "2006",

language = "Undefined/Unknown",

publisher = "Material Research Society",

pages = "--",

editor = "V Schmidt",

booktitle = "Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings",

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Civale, Y, Nanver, LK, Hadley, P, van Zeijl, HW, Goudena, EJG & Schellevis, H 2006, Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications. in V Schmidt (ed.), Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings. Material Research Society, San Francisco, USA, pp. -, MRS Spring Meeting, 17/04/06.

Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications. / Civale, Y; Nanver, LK; Hadley, P et al.
Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings. ed. / V Schmidt. San Francisco, USA: Material Research Society, 2006. p. -.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

AU - Civale, Y

AU - Nanver, LK

AU - Hadley, P

AU - van Zeijl, HW

AU - Goudena, EJG

AU - Schellevis, H

N1 - isbn: 978-1-55899-897-1, page: 0940-p05-04

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - -

BT - Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings

A2 - Schmidt, V

PB - Material Research Society

CY - San Francisco, USA

T2 - MRS Spring Meeting

Y2 - 17 April 2006 through 21 April 2006

ER -

Civale Y, Nanver LK, Hadley P, van Zeijl HW, Goudena EJG, Schellevis H. Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications. In Schmidt V, editor, Material Research Society Symposium Proceedings (940E, Warrendale, PA) Semiconductor Nanowires Symposium Proceedings. San Francisco, USA: Material Research Society. 2006. p. -