Original languageEnglish
Title of host publicationProceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems
EditorsY Suzuki, M Wong
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages572-575
Number of pages4
ISBN (Print)978-1-4244-5764-9
Publication statusPublished - 2010
EventIEEE MEMS 2010, Hong Kong SAR, China - Piscataway, NJ, USA
Duration: 24 Jan 201028 Jan 2010

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2010, Hong Kong SAR, China
Period24/01/1028/01/10

    Research areas

  • Conf.proc. > 3 pag

ID: 3682551