LPCVD amorphous SiCx for freestanding electron transparent windows

B Morana, JF Creemer, F Santagata, C.C Fan, HTM Pham, G Pandraud, FD Tichelaar, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems
EditorsY Suzuki, M Wong
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages572-575
Number of pages4
ISBN (Print)978-1-4244-5764-9
Publication statusPublished - 2010
EventIEEE MEMS 2010, Hong Kong SAR, China - Piscataway, NJ, USA
Duration: 24 Jan 201028 Jan 2010

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE MEMS 2010, Hong Kong SAR, China
Period24/01/1028/01/10

Keywords

  • Conf.proc. > 3 pag

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