@inproceedings{3cf86ba96c5945a99cdc017811cdf01f,
title = "LPCVD silicon nitride-on-silicon spacer technology",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{van Zeijl}, HW and LK Nanver",
note = "Editors, ISBN, uitgever & plaats onbekend; 20th International Symposium on Microelectronics Technology and Devices, Florian{\'o}polis, Brazil ; Conference date: 04-09-2005 Through 07-09-2005",
year = "2005",
language = "Undefined/Unknown",
isbn = "1-56677-426-8",
publisher = "The Electrochemical Society, Inc.",
pages = "153--162",
editor = "s.n.",
booktitle = "Electrochemical Society Proceedings",
}